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Electrical variable capacitor using symmetrical switch configuration for reducing switch voltage in RF plasma systems
Juhwa Min Beomseok Chae Yongsug Suh Jinho Kim Hyunbae Kim
Vol. 20, No. 6, pp. 1562-1572, Nov. 2020
10.1007/s43236-020-00129-0
Vol. 20, No. 6, pp. 1562-1572, Nov. 2020
10.1007/s43236-020-00129-0
Pulse current generator with improved waveform fidelity for high‑voltage capacitively coupled plasma systems
Beomseok Chae Juhwa Min Yongsug Suh Hyejin Kim Hyunbae Kim
Vol. 20, No. 5, pp. 1316-1327, Sep. 2020
10.1007/s43236-020-00110-x
Vol. 20, No. 5, pp. 1316-1327, Sep. 2020
10.1007/s43236-020-00110-x